【摘要】 梳状一维位置敏感探测器是一种高精度的位置敏感探测器 PSD(Position Sensi-tive Detector)。反向击穿电压是 PSD器件的关键性能参数之一 ,目前国内的此类产品普遍存在反向击穿电压较低。为了改善 PSD的技术性能 ,详细分析了梳状一维 PSD反向击穿电压低的原因 ,并提出了几条有效的改进措施更多还原

【Abstract】 A comb type PSD is a high accuracy position sensitive detector, the reverse breakdown voltage is main parameter, usally the reverse breakdown voltage of this manufacture is lower. Which factories were analyzed and the improvement step were listed in this paper.更多还原