【摘要】 为了实现平面工作台三自由度位移的同步检测 ,研制了图像处理位移检测系统。以CCD相机为核心 ,结合显微镜放大、图像采集和图像处理构成检测系统。图像处理软件用VC编制 ,计算并绘制了工作台三自由度位移随时间的变化关系 ,以及工作台在平面内的运动轨迹。系统的位移检测不受工作台大幅转动的影响。检测系统达到了亚像素级的位移分辨率。选择合适的显微镜放大倍率 ,可使检测系统既有较高的位移分辨率 ,又有一定的位移检测范围更多还原

【Abstract】 A detection system is developed to measure the three freedom degrees displaceme nts of planar stage. The core parts of the system are CCD camera, microscope, im age collection and image processing. The software of image processing is written using VC. The relationship between time and displacements of X, Y and Θ is calculated and plotted. Movement track of the stage is also plotted using th is software. Displacements detection of the system is not influenced by large ro tation of planar stage. Displacement resolution of sub pixel is achieved. The system can obtain both high resolution and large detection range by selecting t he appropriate magnification of microscope.更多还原