【摘要】 一种新型的硅微机械F P腔可变衰减器 ,具有体积小、插入损耗低、调节精度高等优点 ,介绍了其基本结构、基本原理。分析了F P腔两个反射镜的光学特性对F P腔性能的影响 ,包括两反射镜反射率对插入损耗、最大衰减量、工作范围的影响 ,以及F P腔腔长与衰减量之间的关系 ,分析了这种衰减器的带宽响应。衰减器体积只有 2 0 0× 2 0 0× 30 0 μm左右 ,插入损耗小于 2dB ,最大衰减量为 44dB左右。更多还原

【Abstract】 A kind of silicon micromachine F-P cavity variable attenuator is introduced. Basic structure and basic principle is described .It has advantages of minuteness volume, low insertion loss, high adjustment precision. Influence of optical characteristics of the two mirrors on the Fabry-Perot cavity property is analyzed, including influence of the reflectance of the two mirrors on the insertion loss, on the maximum attenuation, on the attenuation variable range, and the relationship between the Fabry-Perot cavity length and the attenuation. The respond bandwidth of attenuator is analyzed. According to the result of analysis, the volume of the attenuator is only about 200×200×300μm. The insertion loss is smaller than 2dB. The maximum attenuation is about 56dB. The analysis and discussion offer the base for the design of variable attenuator.更多还原