【摘要】 采用sol-gel方法制备出BaxSr1-xTiO3(BST)薄膜,并优化工艺提高其介温变化率最大可达6%。通过半导体光刻工艺,刻蚀出BST探测单元,较好的解决了UFPA技术中的探测单元制备问题。设计了初级信号处理电路,并用Protel进行了电路模拟,所得信号可以应用于进一步的信号处理。更多还原

【Abstract】 BaxSr1-xTiO3(BST) thin films were prepared by sol-gel method, and the differential dielectric constant against temperature is improved up to 6%around 11℃by the introduction of abuffer layer. The detector pixel patterns and microbridge were fabricated by l ift-off and chemically etching methods after semiconductor lithographic process. Photograph results s how that the fabrica-tion of UFPA detector pixel is well resolved. A detector circuit were also des igned, and the Protelsimulation shows that it can provide appropriate signal for later process.更多还原