【摘要】 介绍了一种简单而有效的天平方法来检测高量程微机械加速度传感器芯片的静态特性。设计了一种新结构,上面带有压敏电阻,用该方法测量到的静态特性和理论结果比较,两者基本一致,芯片的静态输出特性在测量限20000g(g为重力加速度)内呈直线,非线性为1%左右,灵敏度与理论值在20%的偏差内一致。由于其操作简单、低廉且有较高的分辨率,这种方法适合于平板型高量程压阻式加速度传感器芯片封装前进行抽样检测。更多还原

【Abstract】 A simple and effective method using a balance to test the micromachining p iezoresistive accelerometer with a high -range was introduced.In order to perform the b alance approach,a double -supported thin -plate mass s tructure is designed with four piezo resistors on the chip,and the results are proximate to the theoretical ones.The output characteristi c of the specimens shows a line with nonlinearity about 1%and the ex perimental sensitivity keeps in accordance with the theoretical results within 20%error.The balance method is suitable for sampled test of the die because of its easiness in operation,low cost and h igher resolution.更多还原