【摘要】 研究了高支化碱溶性感光聚合物的碱溶性、感光性及其光致抗蚀剂的成像显影性能。研究发现高支化碱溶性感光聚合物酸值越大 ,图像越清晰 ,显影时间越短 ,并具有更良好的图像断面 ;平行光曝光图像清晰度和断面情况均比点光源好 ;在合适的成像显影条件下 ,经UV白光接触曝光高支化感光聚合物抗蚀剂图像分辨率可达到约 1μm。更多还原

【Abstract】 The photoimagery development behaviours such as solubility,photosensitivity,and photoresistivity of hyperbranched polyesters were investigaled. It was found that the mors the acid value of the polyester. The shorter the exposure and the more excellent the sectionof image were; the clarity and section of the image from a mixed parallel light were better than that from a point light source. The resolving power of the photoresist based on the polyester could be reached to about 1μm by a UV white light contace exposing under a suitable development conolition.更多还原