【摘要】 采用真空热蒸发VE、射频溅射沉积RF和近距离升华CSS技术制备CdTe薄膜 ,并对其进行掺杂研究。样品利用XRD、SEM、紫外 可见分光光度计和霍尔系数测量系统进行测试。结果显示 ,CSS制备的CdTe薄膜与VE和RF法制备的薄膜相比 ,晶粒大 ,晶形好。适当的掺杂某些元素 ,适当的掺杂量 ,可以改善CdTe薄膜的结晶性能 ,提高其导电性能。掺杂对CdTe薄膜的光能隙影响不大。更多还原

【Abstract】 In this paper CdTe and doping CdTe thin films have been prepared by vacuum evaporation(VE)?RF sputtering and close spaced sublimation(CSS)technique. Experimental results have been studied by XRD?SEM?UV and HALL mesurement. The results show that the films deposited by CSS have larger crystalline grain and better appearance than the films prepared by VE?RF. Proper doping some elements and proper doping quantity can improve crystallization and conductivity properties of CdTe thin films . Doping has a little influence on Eg of CdTe thin films.更多还原