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柔性衬底氧化物半导体透明导电膜的研究进展
Process in transparent conducting oxide films prepared on flexible substrates
【摘要】 回顾和评述了柔性衬底氧化物透明导电膜 (包括锡掺杂的三氧化二铟ITO薄膜、铝掺杂的氧化锌AZO薄膜等 )的研究进展情况。报道了在柔性衬底上制备的ITO膜、ZnO膜的光电性质对衬底种类、制备工艺以及制备参数的依赖关系 ,给出了在此领域内应进一步进行的工作
【Abstract】 The progress in the study on TCO films (including ITO films and AZO films) prepared on organic substrates was reviewed in this paper. It was also reported that the optical and electronic properties of films deposited on flexible substrates depend on substrate types, preparation techniques and parameters. In addition, the future work that should be done in this field was mentioned.
【关键词】 柔性衬底;
氧化物半导体;
透明导电膜;
【Key words】 flexible substrates; oxide semiconductors; transparent conducting films;
【Key words】 flexible substrates; oxide semiconductors; transparent conducting films;
【基金】 国家自然科学基金资助项目 (698760 2 5 ;60 0 760 0 6) ;山东省科委 ;山东省自然科学基金资助项目
- 【文献出处】 功能材料 ,Journal of Functional Materials , 编辑部邮箱 ,2002年04期
- 【分类号】TN305
- 【被引频次】27
- 【下载频次】807