【摘要】 LIGA技术具有加工精度高,深宽比大,表面平整,应用领域广等优点,是一种先进的微细加工方法。将LIGA技术的这些优点充分用于过滤介质的制作中,能改善过滤介质的力学强度、机械性能、流阻大小、可再生性等过滤性能。实验中,通过选用不同的材料、适当调整工艺步骤、以及结合微细电火花加工方法等,分别制作出了胶结构、镍结构、不锈钢、以及金结构等多组材料不同、过滤孔隙形状、大小各异的过滤介质,能满足多种不同过滤场合的需求。更多还原

【Abstract】 High processing precision, high aspect ratio and great structural height are the most outstanding advantages of LIGA process, which is a kind of advanced process used in MEMS (Micro electron mechanical systems). Fabricating filter medium by LIGA can improve its mechanical intensity and performances, reduce its flow resistance and enhance its regeneration capability. In this experiment several kinds of filter media with different materials and shapes are fabricated by LIGA,which include PMMA resist, nickel, stainless steel and aurum microstructure.They could be used in different filtrating applications for different requirements.更多还原