【摘要】 研究了电子辅助热灯丝法生长金刚石厚膜过程中氢气流量对沉积速度和膜品质的影响 .随氢气流量从 1 0 0增加到 75 0 cm3/min,金刚石膜的沉积速率单调上升 ,但金刚石膜品质不断下降 ,从 75 0到 1 0 0 0cm3/min,金刚石膜沉积速率下降 ,但金刚石膜品质随氢气流量增加而提高 .拉曼光谱和电子顺磁共振谱研究发现 ,在所制备的金刚石膜中含有替代形式的氮 ,氮含量随氢气流量的增加而减小 ,1 0 0 0 cm3/min流量下沉积的金刚石膜的含氮量仅为 1 0 0 cm3/min流量下沉积的金刚石膜的 1 /4 0 .更多还原

【Abstract】 Thick diamond films have been deposited by Electron Assisted Hot Filament Chemical Vapor Deposition Method. The effects of hydrogen gas flow rate on the diamond films growth rate and diamond qualities have been studied. It is found that, with the gas flow rate increasing, in the range of 100 to 750 cm\+3/min, the diamond films growth rates increase while the diamond qualities get worse, and in the range of 750 to 1 000 cm\+3/min the diamond films growth rates decrease whilethe diamond qualities are improved. Raman spectroscopy and Electron Paramagnetic Resonance has been used to detect the impurities of Nitrogen. The concentration of nitrogen in the diamond film decreases with the increase of gas flow rate, and it is 40 times higher in diamond films deposited at 100 cm\+3/min than that at 1 000 cm\+3/min.更多还原