【摘要】 给出基于硅的微机械光开关的设计分析。优化设计了光开关结构 ,提出了一种降低扭臂式结构光开关驱动电压的方法。并根据不同结构 ,给出了静电驱动等方面的分析结果。更多还原

【Abstract】 This paper reports optimization and design of a MOEMS optical switch based on silicon. The structure of the optical switch is optimized. The method presented can reduce the drive voltage of torsion beam switch. Finally we give analytical results of electrostatic drive based on different structures.更多还原