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基于激光捕捉微粒子实现微细加工的新概念研究
Study on a new concept for realizing microfabrication based on laser trapping microparticles
【摘要】 利用高倍显微物镜所聚合的激光在粒子表面所产生的辐射压可捕捉几个微米大小的高强度粒子,这些被捕捉的粒子在激光驱动下,能移动、转动及振动,可成为微加工工具,在被加工表面上形成微米乃至纳米级的表面微细切削。基于几何光学模型对捕捉进行数字仿真,所设计形状粒子的加工力最大可达到mW/N101.210-。
【Abstract】 The high-intensity particles with a size of several micrometers can be trapped by means of radiation pressure produced on microparticle surface by a converged laser beam with high-power microscope. With the driving of laser, these trapped microparticles can be moved, turned and vibrated and becoming a micro-processing tools, thus nanometer scale micro-cutting on the processed surface can be finished. A digital simulation is carried out on the basis of geometrical optical models, the maximum processing force of the designing shaped microparticles can be as high as 2.110-10N/mW.
- 【文献出处】 光电工程 ,Opto-electronic Engineering , 编辑部邮箱 ,2002年S1期
- 【分类号】TG66
- 【被引频次】2
- 【下载频次】87