【摘要】 探讨了表面弹性波马达的工作机理和优化设计。采用具有能量循环功能的表面弹性波换能器结构,提高了表面弹性波马达效率,将马达的驱动电压阈值从100V降到了10V以下。在频率10MHz,峰峰值为10V的正弦电压激励下,获得振动幅度为20nm的表面弹性波,马达的无负载速度达到0.34m/s,最大推动力输出达到0.06N。更多还原

【Abstract】 The operating principle and optimization design for Surface Acoustic Wave (SAW) motor are investigated. The efficiency of SAW motor is improved when it has the transducer structure with energy circulation function, thus the driving voltage threshold of the motor has been reduced from 100V to less than 10V. The surface acoustic wave with 20nm vibration magnitude is obtained when the motor is excited by sinusoidal voltage with 10MHz frequency and 10V peak-to-peak value. The non-loading speed of the motor is 0.34m/s and its maximum driving force output is 0.06N.更多还原