【摘要】 集成的阵列式的微传感器是当今传感器发展的一个方向,例如广谱气体传感器,该种传感器需要把多个微热板集成在同一个芯片,形成微热板阵列的器件形式。由于传感器需要在特定的温度条件下工作,因此需要对微热板阵列进行热性能的评估。本文针对研制中的气体传感器的2X2的微热板阵列,用红外热成像技术进行了测试和分析,获得其微小区域的温度分布和一些工作特性,为微传感器的研制和改进提供了实验依据。更多还原

【Abstract】 A micro hotplate array was made by incorporating several micro hotplates into a single chip as an integrated sensor array. The sensing film must operate at a specific high temperature condition (300 ~ 400癈) with a low power consumption. In addition, each hotplate should be independent and all the hotplates should be uniform thermally. Therefore the thermal characteristics of the individual hotplate must be measured. In this work, the temperature distribution in a 2 x 2 micro hotplate array was measured using infrared thermography. The temperature distribution of the small area and other thermal characteristics were obtained, providing reliable experimental information for the design of the micro hotplate array.更多还原