【摘要】 本文简单介绍了SOI和 DSOI半导体器件制造技术,并提出了单管体硅,SOI及 DSOI MOSFET的热阻模型。进而对体硅,SOI MOSFET器件,特别是DSOI MOSPET的热学特性进行数值计算,比较并分析了其数值计算结果。更多还原

【Abstract】 SOI and DSOI, two kinds of techniques in fabrication of semiconductor devices, are introduced concisely in this paper. For single BULK-Si, SOI and DSOI MOSFET, this paper develops their thermal resistance models and analyses the analogous results accordingly.更多还原