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不同衬底上制备YBa₂Cu₃O_7-δ超导薄膜的微结构研究

STUDY OF MICROSTRUCTURE OF YBCO FILMS ON DIFFERENT SUBSTRATES

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【Author】 Wang Xiao ping\ \ Liu Yuan\ \ Wang Pei wen\ \ Li Ji Lin Chen guang\ \ Hua Zhi qiang\ \ Feng Ji\+1\ \ Wu Bai mei\+2\ \ Du Ying lei\+2 General Research Institute for Nonferrous Metals, Beijing\ 100088 \ \+1Institute of Physics, Chinese Academy of S

【机构】北京有色金属研究总院；中国科学院物理研究所；中国科学技术大学；中国科学技术大学北京100088；北京100088；北京10008；

【摘要】采用大直径中空柱状阴极直流磁控溅射装置 ,在LaAlO3 和Zr(Y)O2 衬底上制备YBCO超导薄膜 .用透射电镜 (TEM)、扫描隧道显微镜 (STM)和原子力显微镜 (AFM)对薄膜和衬底间的界面 ,薄膜的螺旋生长结构 ,YBCO薄膜及其相应衬底的表面形貌进行了观察和测量 .分析了基片表面形貌及表层内缺陷对界面附近薄膜组织结构的影响 .研究了不同衬底沉积的超导薄膜具有不同表面形貌的原因 .从生长机理角度对表面形貌、缺陷和位错的形成机制进行讨论更多还原

【Abstract】 The YBCO thin films on LaAlO\-3 and Zr(Y)O\-2 substrates were prepared by dc magnetron sputtering method. The interface between film and substrate, the spired growth structure of the film and the surface morphology of YBCO film and substrate were observed and measured by the transmission electrical microscopy (TEM), the scanning tunnel microscopy (STM) and the atomic force microscopy (AFM) et al. We analyze the surface morphology, the defect and dislocation, as well as the influence of surface and defect on film structure.更多还原