【摘要】 采用溶胶 凝胶方法制备了SnO2 掺杂Sb的透明导电膜 (简称ATO膜 ) ,并讨论了掺杂量和热处理条件对膜可见光透过率及膜电阻率的影响 ,用XRD ,SEM ,TG DTA以及IR等研究了所得薄膜的结构性质 ,制备出导电性能优良的透明导电膜更多还原

【Abstract】 This paper presents preparation of Sb doped SnO 2 transparent conductivefilm(simplified as ATO)by Sol-Gel process. Influence of the amount of dopant,treatment conditions on the transparency to visible light, and resistivity of thefilm are investigated. The structure of the SnO 2 film is characterized by XRD,SEM,TG-DTA and IR. It is verified to be a kind of high-quality conductive film.更多还原