【摘要】 描述了透射型ZnSxSe1 -x光盲紫外液晶光阀的结构和工作原理 ,并从器件的电学模型出发 ,着重讨论了整体器件对ZnSxSe1 -x光敏层的特殊要求。采用分子束外延技术在ITO石英导电玻璃上制备了不同组分的三元ZnSxSe1 -x多晶薄膜 ,通过控制反应时的生长参数 ,制备出了符合器件设计要求的光敏层薄膜。室温下 ,薄膜的紫外 可见光响应对比度大于 10 3,响应波长截止边可通过控制薄膜中的Se组分 ,在 36 0～ 4 10nm范围内连续可调 ;薄膜的紫外 可见光吸收系数比大于 10 3;在液晶光阀工作的低频段 (<2 0 0Hz) ,其暗阻抗在 10 5～ 10 6 Ωcm2 之间 ;暗 亮阻抗比满足器件要求更多还原

【Abstract】 Detailed description was given of the structure and operation of the novel ZnS xSe 1-x visible blind ultraviolet liquid crystal light valve(UV\|LCLV) in transmission mode.The opto\|electronic requirements of ZnS\-xSe 1-x photosensor for the device were derived and discussed from the UV LCLV electrical model and equivalent circuits.Suitable polycrystalline ZnS\-xSe 1-x film that provided a good matching with the requirements of LCLV were deposited on ITO coated quartz glass by molecular beam epitaxy technique (MBE).Room teperature photo\|responsivity measurements performed on these thin films show that the visible rejection power can reach as high as 3 orders in magnitude.The cutoff wavelength of the response is between 360nm～410nm and follows the energy\|gap dependence on the Se composition of the alloy thin films.The calculated absorption coefficient in UV spectrum is 3 orders higher than in visible region.The results of a.c.characterisation measurements further indicate that the film has a suitable ratio of dark/photo impedance and the dark impedance is between 10\+5～10\+6Ωcm\+2 at the low operation frequency(<200Hz) of LCLV.更多还原