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溶胶—凝胶法制备TEOS-DOS基SiO2疏水减反射膜:溶胶微结构对膜性能的影响

Preparation of TEOS-DDS Based Water-Repellent Anti-Reflective SiO2 Films by Sol Gel Process:Effects of Micro-structure of Sols on Performances of Films

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【作者】 徐耀范文浩章斌吴东孙予罕

【Author】 XU Yao,FAN Wen hao,ZHANG Bin,WU Dong,WUN Yu hna (Key Laboratory of Coal Conversion,Shanxi institute of Coal Chemistry,China Academy of Science,Taiyuan 030001,China)

【机构】 中国科学院山西煤炭化学研究所煤转化国家重点实验室中国科学院山西煤炭化学研究所煤转化国家重点实验室 山西太原03

【摘要】 以乙醇为溶剂 ,正硅酸乙酯 (TEOS ,tetraethoxysilane)在氢氧化铵催化下水解缩聚为纳米尺度的无定型SiO2 溶胶颗粒 ,二甲基二乙氧基硅烷 (DDS ,dimethyldiethoxysilane)在盐酸催化下水解缩聚为线状聚二甲基硅氧链。用混合溶胶在玻璃基片上旋转镀膜 ,然后于 80℃空气气氛下热处理。实验证明通过DDS将疏水的双甲基链引入镀膜胶体 ,使膜兼具疏水性和减反射性能。利用激光散射粒度分析仪和电子显微镜研究了溶胶颗粒的粒度变化和聚集情况等溶胶微结构 ,用物理吸附仪研究了膜的孔结构 ,考察了热处理前后膜的疏水性和透射谱 ,得到了溶胶微结构与膜性能之间的关联

【Abstract】 Basic sols containing amorphous SiO 2 particles were prepared trough sol gel process with TEOS(tetraethoxysilane)as precursor in alcohol systeml.Acidic sols containing polymer of DDS(dimethyldiethoxysilane)were also prepared by sol gel method.After mixing these two kinds of sols,spinning coating was used to deposit films on carefully cleaned substrates of glass and then heat treatment of films was executed in air at 80℃ for three days.Through our experints,films gained water repellence and anti reflectivity at the same time by introduce Si O Si linkage containing double CH 3.The particle size analysis by laser scattering and electroscope were employed to study microstructure of sols,such as, particle size in sols and gathering behavior of particles.The porosities of films were calculated using physic adsorption instrument.The contact angle between water drop and film and the transmittance of film were measured both before and after heat treatment.On the base of above research,we got the inner relation between the microstructure of sols and the performance of films.

【关键词】 溶胶凝胶法疏水减反射TEOSDDS
【Key words】 sol gelwater repellentanti reflectivecoatingTEOSDDS
【基金】 国家自然科学基金资助项目 ( 2 0 13 3 0 40 )
  • 【文献出处】 材料科学与工程 ,Materials Science and Engineering , 编辑部邮箱 ,2002年03期
  • 【分类号】TB43
  • 【被引频次】11
  • 【下载频次】457
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