【摘要】 用微等离子体氧化法制备出纯相的 Ba Ti O3陶瓷膜 ,对所得的陶瓷膜进行 XRD和 EPMA分析。结果表明 ,膜层中钡钛两种元素分布均匀 ,无浓度梯度变化。结合实验现象和测试结果 ,探讨了浓度和电流密度对陶瓷膜的影响 ,并提出了 Ba Ti O3陶瓷膜成膜过程中的可能反应机制过程更多还原

【Abstract】 Barium titanate thin films was fabricated by microplasma oxidation, and analyzed by XRD and EPMA The results show that the barium and titanium are distributed evenly without gradient change in the films According to the phenomena of experiments and results of tests, the influence of concentration and electric density on the film was discussed, and the possible reactions in the process of film fabrication were brought forward更多还原