【摘要】 在两种经不同预处理的硬质合金YG8基底上 ,采用微波等离子体化学气相沉积法 ,在微波功率 2kW ,压强4 .0kPa和 6 .5kPa ,CH4 和H2 流量分别为 1.6cm/s和 10 0 .0cm/s的条件下生长金刚石薄膜。利用X射线衍射检测了金刚石薄膜是否存在 ,用拉曼光谱分析了薄膜的质量 ,用金相显微镜观察了薄膜的洛氏硬度压痕 ,标定并比较了不同预处理工艺膜与基底的结合力。实验结果表明 ,不同的预处理方法对于粘结力的影响不大 ,最主要的因素是钴含量的多少。更多还原

【Abstract】 Diamond thin films were prepared on cemented carbides with two different pretreatments by microwave plasma chemical vapor deposition (MPCVD) with 2 kW microwave power, 4.0 and 6.5 kPa pressure, 1.6 cm/s and 100.0 cm/s flowing volume of CH\-4 and H\-2. The existence and quality of diamond film were analyzed by x\|ray diffraction (XRD) and Raman spectra, and metallographic microscope was used to observe the Rockwell indenting loading of the film and compare the differences of the adhesions. Experimental results indicated that there was little effect on adhesion of two different pretreatment ways, and the content of cobalt was dominant factor.更多还原