【摘要】 介绍了一种利用新型发光二极管外延片光致发光光谱在线检测仪对 Ga P发光二极管外延片进行在线无损检测和质量控制的方法 .通过对检测结果的统计分析 ,得出了对生产工艺的改进意见 .最终实现了提高 Ga P外延片质量的目的更多还原

【Abstract】 Method of indestructible examination and quality controlling of GaP LED epi wafers by a new photoluminescence mapping system is presented.The suggestions to improve the wafer production technique are educed from statistical analysis of the examination result.The improvement of GaP LED epi wafers’ quality is realized by this method.更多还原