【摘要】 介绍了用湿法化学腐蚀的方法制备GaAs晶体微型电光探针 .用光学显微镜和扫描电子显微镜观察了探针形貌 .微探针为金字塔形 ,底座是边长为 2 0 μm的正方形 ,尖端尺寸在 2 μm左右 .侧面比较光滑 ,棱角分明 .微型电光探针整体尺寸很小 ,在外电光检测系统中可以显著降低对被测电场的影响 ,从而提高测量精度 .更多还原

【Abstract】 To etching Gallium Arsenide crystal to manufacture tiny electro-optic probe by the wet chemical etching technique is introduced.The shape of tiny probe is observed by optical microscopy and scanning electron microscopy.The tiny probe’s shape is pyramidal with bottom size of 20μm square and tip size of about 2μm.The probe’s flanks are smooth,moreover edges and corners are very clear.Since the size of tiny electro-optic probe is very small,the probe’s influence to the measured electric field can be reduced remarkably.So high measuring precision can be acquired.更多还原