【摘要】 采用超声雾化技术 ,以醋酸锌水溶液为源物质 ,在加热的玻璃衬底上生长了ZnO薄膜 ,并研究了衬底温度等因素对薄膜结构及其光、电性能的影响 .结果表明其为六方晶体 (纤锌矿 )结构 ,在适当的条件下 ,可以生长出具有较强c轴取向的ZnO薄膜 ,所得到的ZnO薄膜具有低达 7 6 8× 10 10 cm-3 的载流子浓度 ,这对实现ZnO的p型掺杂具有重要意义 .更多还原

【Abstract】 Zinc oxide thin films are prepared by pyrolysis of the nebulized solution of zinc acetate onto the heated glass substrates.The properties of the films are studied by XRD,UV-VIS absorption and Hall effect measurement.The results show that the films exhibit hexagonal wurtzite structure with c -axis perpendicular to the substrate surface.The effects of the substrate temperature on the electrical and optical properties of ZnO thin films are also studied.As-grown ZnO thin film with carrier concentration as low as 7.68×10 10 cm -3 is obtained,which is important to fabricate p-type ZnO films.更多还原