【摘要】 以离子注入工艺为例 ,通过研究沟道效应对离子注入工艺的影响 ,提出了建立设备模型的必要性 ,并进行了离子注入设备模型的初步研究更多还原

【Abstract】 With the rapid development in the process of integrated circuits,the function of the process simulation software has been improved constantly,but its shortcoming appears increasingly.The influence of equipment on the process has not been counted in.In order to promote the improvement of this situation,it is necessary to establish an equipment model in process simulation.Taking the process of ion implantation as an example,some elementary research on ion implantation equipment model considering the influence of the channeling effects on the process is accomplished.更多还原