【摘要】 MEMS的可靠性是其能否成功应用的一个关键。本文对MEMS可靠性测试的要求与可靠性测试系统ShiMMeR进行了分析,通过对MEMS的可靠性实验与失效模型的综述,对MEMS的可靠性设计进行了探讨。更多还原

【Abstract】 One of the key for successful application of MEMS is in proving its reliability.In this pa-per,the reliability testing require for MEMS and reliability testing system ShiMMeR were analyzed,reliability experiments and failure modes of MEMS were summarized,and reliability design for MEMS was discussed.更多还原