节点文献
温度对薄膜渗氦型漏孔漏率的影响研究
RESEARCHES ON TEMPERATURE EFFECTS ON LEAKAGE RATE OF HELIUM PERMEATING LEAK
【摘要】 介绍了气体微流量标准装置对漏率的校准方法。在温度 16～ 5 0℃范围内 ,对两支薄膜渗氦型漏孔进行了校准 ,并给出了温度与漏率的关系表达式。得出了研究结论。
【Abstract】 The calibration method of leakage rate with the gas low range standard apparatus is introduced.Two helium permeating leaks have been calibrated in the range of temperature from 16℃ to 50℃ and the relation expressions between temperature and leakage rate are presented.
- 【文献出处】 真空与低温 ,Vacuum and Cryogenics , 编辑部邮箱 ,2001年04期
- 【分类号】TB774
- 【被引频次】6
- 【下载频次】70