【摘要】 结合金刚石膜的具体情况 ,考虑到色散效应、膜的微结构、表面粗糙度及样品中自由载流子和C -H的吸收等多种因素对红外透过谱的影响 ,在无吸收单层膜透过率模型的基础上进行了修正 ,给出了自支撑金刚石薄膜透过率的数学模型。并对不同制备方法和工艺参数下沉积的金刚石膜的红外透过谱用Levenberg -Marquardt算法进行非线性最小二乘拟合 ,从而确定出样品的红外光学常数和其它影响透过率的因素。这些结果对正确分析金刚石薄膜的红外光学性质是很重要的更多还原

【Abstract】 By combining the reality of CVD diamond,transmittance model of free standing diamond films was derived.In the model,several factors affect transmittance such as chromatic dispersion, optical non_uniformity, surface roughness and absorption of the graphite (free carries) and carbon-hydrogen bonding in the sample-were considered.IR spectra of diamond was non_linear least square fitted(NLSF) by Levenberg_Marquardt algorithm.Reliable frequency dependence of n and k, together with thickness,surface roughness,impurities and microstructure were then obtained.This result will be important for a correct analysis of the IR properties of diamond films.更多还原