节点文献
硅基底平面波导光通讯集成器件的模拟、设计及工艺
Design,simulation and fabrication technique of integrated silica-based planar optical waveguide devices
【摘要】 随着平面波导制作工艺的日益成熟 ,制造精度的不断提高 ,成本的持续下降 ,平面波导光集成器件尤其是 Si基底上 Si O2 平面波导集成器件在光通信系统中的应用更加重要和广泛 .Y分支分束器、MMI耦合器、阵列波导光栅 (AWG)和蚀刻衍射光栅 (EDG)等平面波导集成器件正扮演着越来越重要的作用 ,BPM等数值计算方法在这些器件的设计和模拟中也起了重要作用 .本文就此作了一些探讨 .
【Abstract】 Silica-based integrated optical technology is reviewed. Design and sim ulation for devices on Silica-based planar optical waveguide such as MMI couple r , AWG and EDG are discussed, some simulated results finished by COER of Zhejaing University using BPM are given. And the very important and widely used modal-s o lving technique in integrated photonic devices design and simulating, the beam p ropagation method, is discussed also.
- 【文献出处】 中国计量学院学报 ,Journal of China Institute of Metrology , 编辑部邮箱 ,2001年02期
- 【分类号】TN252
- 【被引频次】16
- 【下载频次】261