【摘要】 利用光电位置传感器和二维双光杠杆放大 ,能够测量出二维微小距离的变化。本文介绍二维光电传感器双光杠杆测微原理及方法更多还原

【Abstract】 The change of two dimensional micro distance is measured by using a position sensor and the two dimensional amplification of double optical lever.Since the change of micro distance cause the change of reflected spot on the position sersor diode,the change of micro distance could be tested by testing the coordinate X,Y in the position sensor diode.更多还原