【摘要】 光谱仪是种类繁多、应用极为广泛的一种理化分析仪器 ,微加工技术的发展和 MOEMS技术的出现为其微小型化提供了可能性 ,本文着重就采用新型滤光技术的微型光谱仪、利用光纤制作的微型光谱仪以及集成式光谱仪进行介绍。光谱仪的微小型化是我国微型仪器的一个重要发展方向更多还原

【Abstract】 Spectrometer is a kind of analytical instruments of physics and chemistry,which have many varieties and apply in many fields.The development of micromaching and the emergence of the MOEMS technique make it possible to miniaturize the spectrometer.The paper described the miniaturized spectrometer by using novel filter technique,the optical fiber and the integrated micro spectrometers.The miniaturization of spectrometers is one of the important developing ways for micro instruments of our country.更多还原