【摘要】 本文阐述了利用石英晶体的振荡频率与晶体厚度间的关系 ,采用差动测量技术 ,实现薄膜厚度在线测量的原理、方法及系统组成。该法具有精度高、温度稳定性好的特点更多还原

【Abstract】 This paper presents a film thickness on line measurement method by differential measurement technology based on the relationship of quartz crystal oscillation frequency and its thickness.The measurement principle,approach and system framework have been detailed in this paper.This method has proved to be of high accuracy and temperature stability.更多还原