【摘要】 本文介绍了一种应用于红外移相干涉仪的移相器的位移分段非线性校正方法。该装置由压电晶体微位移器 PZT及其驱动电源和控制器组成 ,位移的非线性从校正前的 9.6 %降低到 0 .4%。更多还原

【Abstract】 A new correction method of the non linearity compensation for the phase shifter in infrared interferometer is presented.The phase shifter consists of piezoelectric actuator(PZT),its driver and controller.The nonlinear curve of the PZT performance can be divided into several sections and accurately compensated respectively.The experiments have been done with this method,and the non linearity is corrected to 0 4% from 9 6% before compensation.更多还原