【摘要】 采用了丝网印刷工艺在硅片上制备了锆钛酸铅 (PZT)薄膜 ,进行了相应的工艺分析。设计并仿真了平面光子带隙 (UCPBG)结构 ,测试了结构的电磁参数 ,证实了结构的可行性。在此基础上提出了一种基于 PZT厚膜工艺和平面光子带隙结构的微型射频 (RF)天线结构与工艺设计更多还原

【Abstract】 Lead zirconate titanate(PZT)thick film is fabricated upon silicon substrate by using the screen printing technology.The experiment result is analyzed.UCPBG(uniplanar compact photonic bandgap)structure is designed and simulated.The electromagnetic parameters of the structure are tested to certify the correctness of the algorithm.The structure and technology design of a PZT thick film and UCPBG based miniature radio frequency antenna is brought out.更多还原