【摘要】 根据线性弹性理论集中力的假定 ,计算了矩形膜淀积在InSb衬底上的三维应力分布 ;讨论了钝化膜对InSb衬底应力的影响 ;提出了提高InSb平面二极管可靠性的措施 .更多还原

【Abstract】 The three dimensional stress distributions in a substrate due to a rectangular film deposited on the substrate are calculated by the linear elastic theory on the assumption of a concentrated force at the film and the effect of the passivation film on stress distribution in the InSb substrate are discussed. Finally, the mea sures for improving the reliability of the InSb plane diode are proposed.更多还原