【摘要】 在中国原子能科学研究院HI- 13串列加速器上建立了一套高分辨的弹性反冲探测分析技术 .用高质量的1 2 7I重离子束轰击薄膜或块材靶样品 ,利用Q3D磁谱仪及其焦面探测器和纵向型双电离室ΔE -E望远镜探测器两套探测系统 ,在前角区测量了靶中各种元素的反冲能谱 .利用卢瑟福散射截面和离子在靶材料中的阻止本领 ,将能谱转换成元素的深度分布 .利用Q3D磁谱仪系统 ,对C和H等轻元素的分析得到纳米级的深度分辨谱 .用ΔE -E望远镜探测器可同时得到靶材料上从轻至中重各种元素的深度分布 ,其深度分辨率达 2 0— 30nm .更多还原

【Abstract】 A technique for elastic recoil detection with high depth resolution has been developed at the HI\|13 tandem accelerator of CIAE. When a high quality 127 I beam bombards the target, the recoils are detected by a Q3D magnetic spectrometer following a focal plane detector and a Δ E\|E telescope detector with a longitudinal double\|room ionization chamber. The measured spectra are transformed to the concentration profile of the recoil atoms through knowledge of the Rutherford cross section, the stopping power of the projectile and the recoils in the materials. A nanometer depth resolution was achieved for light elements such as C and H with the Q3D spectrometer system. The depth profile of the elements from light to medium could be simultaneously obtained by the Δ E\|E telescope detector with a depth resolution of about 20—30nm.更多还原