【摘要】 基于液压传递原理 ,设计出一种用动态化学腐蚀法制备大锥角近场光纤探针的装置 .实验结果表明 ,在传统的化学腐蚀法制备光纤探针的过程中 ,通过控制腐蚀液液面的上升速度 ,可以有效地控制探针针尖的形状以及锥角的大小 .在此基础上 ,还论述了分步控制光纤与腐蚀液液面的相对位移的方法在大锥角光纤探针的制备中所具有的独特优越性 .利用所制备的大锥角近场光纤探针在扫描近场光学显微镜上对直径为 2 0 0nm的小球进行探测 ,其力学像证实该探针具有较高的形貌分辨率 (约为 5 0nm) .更多还原

【Abstract】 According to the hydraulic transmission principle, a device for fabricating large cone angle near-field optical fiber probe by means of dynamic chemical etching is developed. The results indicated that in the course of traditional fabrication of optical fiber probes by chemical etching, the configuration and the cone angle of the taper can be controlled efficiently through controlling the velocity of the lifting of etching fluid. Furthermore, The advantage of controlling the displacement between optical fiber probe and etching fluid step by step in the fabrication of large cone angle optical fiber probe is also described in this paper. A large cone angle near-field optical fiber probe in scanning near-field optical microscopy is applied to measuring the sphere with a diameter 200nm. Its force images show that this probe has high topography resolution (～50nm).更多还原