节点文献
Ba0.9Sr0.1TiO3薄膜的椭偏光谱研究
Spectroscopic Ellipsometry Studies of Ba0.9Sr0.1Ti03 Thin Films
【摘要】 用椭偏光谱仪首次在光子能量为２．１～５．２ｅＶ的范围内，测量了不同热处理温度下Ｂａ０．９Ｓｒ０．１ＴｉＯ３（ＢＳＴ）薄膜的椭偏光谱，建立适当的拟合模型，并用Ｃａｕｃｈｙ色散模型描述ＢＳＴ薄膜的光学性质，用最优化法获得了所有样品的光学常数（折射率η和消光系数κ）谱及禁带能Ｅｇ．比较这些结果，初步得到了ＢＳＴ薄膜的折射率η、消光系数κ和禁带能Ｅｇ随退火温度变化的变化规律．
【Abstract】 Ellipsometric spectra of Bo0.9Sr0.1TiO3 (BST) thin films with various annealing temperatures were measured in the range of photon energy from 2.1 to 5.2eV. Constructing appropriate fitting models and describing optical properties of the BST with Cauchy dispersion model, their optical constants (refractive index n and extinction coefficient κ) spectra and band gap Eg were determined by means of an optimization. Compared these results, we obtained the variation of the refractive index n, the extinction coefficient κand the band gap Eg with annealing temperatures.
【Key words】 spectroscopic ellipsometry； optical constant spectra； BST films；
- 【文献出处】 无机材料学报 ,Journal of Inorganic Materials , 编辑部邮箱 ,2001年02期
- 【分类号】O484
- 【被引频次】26
- 【下载频次】118