【摘要】 以无机盐ＳｎＣｌ２·２Ｈ２Ｏ，Ｙ（ＮＯ３）３·６Ｈ２Ｏ为原料，无水乙醇为溶剂，采用溶胶－凝胶工艺制备了Ｙ２Ｏ３掺杂的ＳｎＯ２薄膜．采用差热－失重分析研究了Ｙ２Ｏ３掺杂的ＳｎＯ２干凝胶粉末的热分解、晶化过程．研究了Ｙ２Ｏ３－ＳｎＯ２薄膜的电学和气敏性能．从实验中得到了Ｙ２Ｏ３掺杂份量对ＳｎＯ２薄膜电学及气敏性能的影响．实验表明Ｙ２Ｏ３掺杂的ＳｎＯ２薄膜在常温下对ＮＯｘ具有较好的灵敏度和选择性，并具有较好的响应恢复性能；在常温下对Ｈ２Ｓ气体也具有一定的灵敏度．更多还原

【Abstract】 Pure and Y2O3 doped SnO2 gas sensitive thin films were prepared by the sol-gel technique by using non-alkoxide SnCl2·2H2O ) Y(NO3)3·6H2O as precursors. The thermal decomposition and crystallization process of 1mol%Y2O3-SnO2 thin films and the effect of doping amount on the electrical and gas sensitive properties of SnO2 thin films were studied. The Y2O3SnO2 film shows novel gas sensing properties (good sensitivity, high selectivity and quick response behavior) toward low concentration of NO2 at room temperature.更多还原