【摘要】 用本征金刚石薄膜制备的电容具有高储能 ,高击穿电压 ,耐高温 ,基本电阻可调节以及良好的化学稳定性等特点 .金属与金刚石薄膜形成欧姆接触是电极金属的选取是制备金刚石薄膜电容的重要一步 .本文主要研究金刚石薄膜的欧姆接触及其I-V曲线 .更多还原

【Abstract】 Capacitances prepared with intrinsic diamond films have the characteristics of high energy storage ratio, high breakdown voltage,high temperature resistance,basic resistance adjustable and favorable chemistry stability,etc.One of the important step of preparing diamond film capacitances is that the metal and diamond film form ohm contact while selecting the metal electrodes.In this paper we mostly study on diamond film’ s ohm contact and its I V curve.更多还原