【摘要】 薄膜镀层由于厚度小 ,难以用通常的磨损方法评估其耐磨性。本文研究了采用精密凹坑研磨仪评价薄膜镀层耐磨性的方法 ,并对 Ta N/ Nb N纳米多层膜和 Ta N、Nb N单层膜进行了磨损实验。结果表明 ,精密凹坑研磨仪是一种适用于评价薄膜镀层耐磨性的方法。Ta N/ Nb N纳米多层膜有比 Ta N、Tb N单层膜更高的耐磨性更多还原

【Abstract】 The antiwear properties of thin film coatings are difficult to be evaluated by ordinary method because the coatings are too thin in thickness. A precise dimple grinding method was introduced and discussed and the antiwear properties of TaN/NbN nano multilayer film, TaN and NbN single layer films were evaluated by this new method. The results show that the precise dimple grinding method is a proper method to evaluate the antiwear properties of thin film coatings. TaN/NbN nano multilayer film shows a better antiwear property than TaN and NbN single layers.更多还原