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基于兰姆波技术的液体密度声传感器
Liquid Density Sensor Based on Lamb Wave Technology
【摘要】 在考虑晶体的压电性和各向异性基础上 ,从声的波动理论出发 ,对叉指换能器在液体 -压电晶片界面上兰姆波的激发理论及其性质进行了研究 .分析了兰姆波对液体密度变化的敏感情况 ,提出了一种基于兰姆波技术的测量液体密度微小变化声传感器 .根据传感器敏感液体的特点 ,对其进行实验分析 ,取得了较好的效果 .实验结果表明 ,这种传感器具有良好的性能
【Abstract】 This paper narrated the development and application of the density sensors for liquid, and analyzed their disadvantages of current sensors such as low accuracy, large sample required. To solve these problems, the properties of Lamb wave excited by interdigital transducer in the piezoelectric substrate covered by liquid were studied based on its piezoelectricity and anisotropy. The sensitivity of Lamb wave was analyzed and the working theory of a novel density sensor for liquid based on the Lamb wave technology was presented. According to the properties of sensor, the experiments have been done on it. The results show that the sensor has nice performance, which can provide new ideas for further research on the density sensor for liquid.
【Key words】 liquid density; Lamb wave technology; interdigital transducer; excitation theory; piezoelectric substrate;
- 【文献出处】 上海交通大学学报 ,Journal of Shanghai Jiaotong University , 编辑部邮箱 ,2001年09期
- 【分类号】TP212
- 【被引频次】7
- 【下载频次】124