【摘要】 本文研究了采用直流磁控溅射法制备的Fe-Zr-B非晶薄膜,用X-射线衍射,透射电子显微镜(TEM)和X射线光电子能谱(XPS)研究了薄膜的结构。X射线光电子能谱(XPS)结果表明样品表面氧化较明显,深层部分Fe,zr,B结合占主导地位。用振动样品磁场计测量了薄膜的磁性能,并与用化学还原法制备的非晶Fe-Zr-B超细粉做了比较。更多还原

【Abstract】 The amorphous Fe-Zr-B films prepared by DC Magnetron sputtering has been investigated using X-ray diffraction, TEM and XPS. The result shows that the amorphous Fe-Zr-B film may consist of two amorphous microstructure. XPS shows that surface of the film has been oxygenized partly. The magnetic properties of Fe-Zr-B film has been measured by using VSM and compared with the amorphous superfine powder of Fe-Zr-B prepared by chemical reduction.更多还原