【摘要】 提出了一种单发实验测量软 X射线波段多层膜反射镜反射特性的简易方法。实验采用激光等离子体软 X射线源作为光源 ,用平焦场光栅谱仪分光 ,在光路中引入掠入射镜以消除高级次谱的影响 ,用软 X光 CCD记录 ,在一发激光打靶实验中 ,测量了设计中心波长为 1 3 .9nm的 Mo/Si多层膜反射镜的反射特性更多还原

【Abstract】 A new method of single shot measurement of normal incidence soft X ray Mo/Si multilayer mirror’s reflectance was proposed. Experiment were performed using laser produced plasma X ray source, flat field grating spectrometer and soft X ray CCD. Grazing incident mirror was employed to eliminate high order contribution. Wavelength was accurately determined by the 17.04nm L edge of Al filter. Measurements of Mo/Si multilayer mirror showed a peak reflectance of 35% at 14nm with a 0.5nm bandwidth.更多还原