节点文献
衬底表面预处理增强金刚石薄膜成核的研究进展
Development of Study on Pretreatment of Substrate Surface Enhanced Diamond Nucleation
【摘要】 近年来与金刚石成核有关的技术研究取得了较大的进展。本文综述了衬底表面的预处理对增强利用化学气机沉积生长金刚石薄膜成核的作用 ,并进行了分析和讨论。
【Abstract】 studies on the technologies relating to diamond nucleation have made great progress in late years. In the paper, it was reviewed that the pretreatment of substrate surface enhanced nucleation of diamond films which grew in chemical vapor deposition system,and it was analyzed and discussed.
【关键词】 化学气相沉积;
衬底表面预处理;
增强作用;
【Key words】 chemical vapor deposition; pretreatment of substrate surface; enhancing effects;
【Key words】 chemical vapor deposition; pretreatment of substrate surface; enhancing effects;
- 【文献出处】 平原大学学报 ,Journal of Pingyuan University , 编辑部邮箱 ,2001年02期
- 【分类号】O613
- 【被引频次】3
- 【下载频次】86