【摘要】 对微机电系统的微观摩擦学研究现状进行了综述 ,介绍了在微机电系统中摩擦学呈现的各种新特征 ,以及材料、环境和不同工况条件对微机电系统运行稳定性的影响 .从微观摩擦学角度探讨了微机电系统的润滑问题 ,介绍了表面改性和薄膜润滑等在解决微机电系统润滑问题方面的研究现状 ,并对相关领域的工作进展进行了总结和展望更多还原

【Abstract】 The current state and progress of the micro tribological studies on micro electro mechanical systems (MEMS) are summarized. Various new features of the friction and wear behavior of the MEMS are introduced. And the effects of the material properties, environments and working conditions on the operation of MEMS are briefed. The lubrication of MEMS is elucidated with a viewpoint of nano tribology, while the application of surface modification and ultra thin film lubrication for MEMS is discussed. Moreover, a prospect is also provided concerning further work on the micro and nano tribology on MEMS.更多还原