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氮和碳等离子体基离子注入铝合金表面氮化铝/类金刚石碳膜改性层的摩擦学特性
The Tribological Properties of AlN/DLC Modifying Layer on Aluminum Alloy Implanted with Nitrogen and Carbon Plasma Based Ion Implantation
【摘要】 对铝合金 L Y12进行等离子体基氮离子注入后再进行原位碳注入 ,从而在铝合金表面形成氮化铝 (Al N) /类金刚石碳膜 (DL C)改性层 .考察了改性层的硬度及其在不同载荷下的滑动摩擦磨损特性 ;用 X射线光电子能谱仪和小掠射角 X射线衍射仪分析了 Al N/ DL C改性层的成分及相结构 ;用激光 Ram an光谱仪分析了表面单一碳层及磨痕的结构 .结果表明 :Al N/ DL C改性层总厚度达 80 0 nm,最表层为厚 40 0 nm的 DL C薄膜 ,过渡层主要由 Al4C3、β- C3N4、Al2 O3及 Al N等组成 ,注氮层由 Al2 O3和 Al N等组成 ;表面纳米硬度可达 17.4GPa,比 L Y12的硬度高近 10倍 ;在低载荷下 ,改性层的耐磨寿命与 L Y12合金相比提高了约 2 0倍 ,摩擦系数降低了 3~ 5倍 ,耐磨性提高了近 170倍 ;随着滑动载荷的增加 ,其耐磨寿命和摩擦系数逐渐减小 ,而高的承载能力得以保持 .DL C薄膜的耐磨减摩作用、过渡层及注氮层的支撑作用以及 DL C薄膜在摩擦磨损过程中的石墨化作用是摩擦学性能提高的主要原因
【Abstract】 The tribological properties of AlN/DLC layer on aluminum alloy LY12 implanted with N plasma based ion implantation (PBII) plus C in situ plasma based ion implantation were investigated. The elemental composition and phase structure of the surface modified layer were characterized by means of X ray photoelectron spectroscopy (XPS) and glancing angle X ray diffraction (GXRD). The carbon layer on the modified surface and the wear tracks at different loads were analyzed with a laser Raman spectrometer. Meanwhile, the nanohardness and elastic modulus of the modified layer were measured with a nano indenter TM II. The XPS result shows that the modified layer is 800 nm thick, which consists of a 400 nm thick diamond like carbon (DLC) layer dominated with sp 2 bond, a transition zone composed of Al 4C 3, Al 2O 3, AlN, β C 3N 4 and other phases, and N implanted zone containing Al 2O 3 and AlN from, from the outer surface of the modified layer to the Al alloy matrix. The nanohardness of the modified layer is as high as 17.4GPa which is approximately 10 times higher than that of LY12. Compared with LY12 alloy matrix, the modified layer shows greatly improved tribological properties under lower load. Namely, the antiwear life of the modified layer is about 20 times higher than that of the matrix, while the friction coefficient of the modified layer is about only 1/3 or 1/5 of that of the matrix, though the wear resistance of the modified layer is worsened with increase of the load. The remarkable improvement in the tribological properties of the modified layer is mainly attributed to the friction reducing and wear resistant action of the DLC films, the increased support to the DLC films by the transition layer and the N implanted layer, and the transformation of diamond like carbon to graphite like carbon under thermal and strain effects in repeated friction.
【Key words】 aluminum alloy; PBII; DLC film; tribological properties;
- 【文献出处】 摩擦学学报 ,Tribology , 编辑部邮箱 ,2001年05期
- 【分类号】TH117
- 【被引频次】20
- 【下载频次】377