【摘要】 在光纤共焦扫描显微镜（ＦＯＣＳＭ）的基础上，利用其轴向响应曲线的线性部分，给出了一种测定物体微位移的新方法．并用该方法精确测量了压电陶瓷微小的逆压电伸缩效应，分辨率可以达到纳米量级．更多还原

【Abstract】 By utilizing the axial response curve of fiber optical confocal scanning microscopy, a new technique for the micro position has been developed. Using this technique, we measurement the converse piezoelectric expend and contract of PZT with resolution as great as several nanometers.更多还原