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大相对孔径凹非球面镜的加工
The Manufacturing of Concave Aspheric Surface with Large Speed Aperture
【摘要】 过去一直采用平行光管来加工和检验大相对孔径四非球面的方法,存在许多不足之处,如加工精度不高和加工周期长等.现在我们采用补偿法,则可以在较短的时间内获得高精度的凹非球面,其精度可达λ/10~λ/20(rms).经过长期的实践,已充分证明了这种方法是可行的.
【Abstract】 The method, which was used to manufacture and test concave aspheric surface with large speed aperture using collimator in the past years,has many shortcomings,such as low making precision and long period etc. Now using compensatory ways, we can get more accurate surface in a relative short time. And its precision can get λ/10 - λ/20(rms).Through practice for a long time, it has been fully proved that this method is feasible.
【关键词】 大相对孔径;
凹非球面;
补偿法;
【Key words】 large speed aperture; concave aspheric surface, compensatory ways;
【Key words】 large speed aperture; concave aspheric surface, compensatory ways;
- 【文献出处】 量子电子学报 ,Chinese Journal of Quantum Electronics , 编辑部邮箱 ,2001年01期
- 【分类号】TN21
- 【被引频次】9
- 【下载频次】118