【摘要】 介绍净化搬运机械手的总体结构和主从配置的控制系统。它能在完成工作的同时 ,又能与洁净微环境接口密闭。经实际应用 ,效果良好。更多还原

【Abstract】 We introduced the control system of the depurative transportation manipulator in the point of it’s whole structure and it’s principal and subordinate configure. The depurative transportation manipulator can make the interface of depurative minienvironment obturation. It has heen certified that the manipulator is competent for many situation.\;更多还原